Key machining characteristics in ultrasonic vibration cutting of single crystal silicon for micro grooves
نویسندگان
چکیده
منابع مشابه
Vibration-assisted machining of single crystal
Vibration-assisted machining offers a solution to expanding needs for improved machining, especially where accuracy and precision are of importance, such as in micromachining of single crystals of metals and alloys. Crystallographic anisotropy plays a crucial role in determining on overall response to machining. In this study, we intend to address the matter of ultra-precision machining of mate...
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ژورنال
عنوان ژورنال: Advances in Manufacturing
سال: 2019
ISSN: 2095-3127,2195-3597
DOI: 10.1007/s40436-019-00263-4